High-speed, high-precision positioning of stages with unknown vibration characteristics
A research team led by Professor Kaiji Sato (Robotics and Mechatronics Laboratory, Department of Mechanical Engineering, Toyohashi University of Technology) revealed a method for designing with ease an ultra-precise positioning control system on the order of 10 nm, even if the dynamic model and model parameters of the motion mechanism and the machine base on which it is installed are unknown.